Inventor
HAN CHEONSOO
JP4 patents
Patents
4 patentsUS10190217B2Jan 29, 2019
Plasma film-forming method and plasma film-forming apparatus
TOKYO ELECTRON LTD0 citations47
US9406557B2Aug 2, 2016
Copper wiring forming method with Ru liner and Cu alloy fill
TOKYO ELECTRON LTD0 citations39
US10522467B2Dec 31, 2019
Ruthenium wiring and manufacturing method thereof
TOKYO ELECTRON LTD0 citations38
US9253862B2Feb 2, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38