Inventor
HAN DONG-GYUN
KR8 patents
Patents
8 patentsUS7560386B2Jul 14, 2009
Method of manufacturing nonvolatile semiconductor memory device
SAMSUNG ELECTRONICS CO LTD12 citations80
US7318870B2Jan 15, 2008
Method of cleaning semiconductor substrate
SAMSUNG ELECTRONICS CO LTD7 citations72
US11361960B2Jun 14, 2022
Substrate processing apparatus and substrate processing system including the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US7514741B2Apr 7, 2009
Nonvolatile semiconductor memory device and related method
SAMSUNG ELECTRONICS CO LTD2 citations61
US10707071B2Jul 7, 2020
Substrate processing apparatus and substrate processing system including the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US7959738B2Jun 14, 2011
Method of removing photoresist and method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US7262141B2Aug 28, 2007
Methods for cleaning a semiconductor substrate having a recess channel region
SAMSUNG ELECTRONICS CO LTD1 citations51
US10668403B2Jun 2, 2020
Source supplier for a supercritical fluid, substrate processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations39