Inventor
STEIN BENEDIKT
DE13 patents
Patents
13 patentsUS9936298B2Apr 3, 2018
MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection
BOSCH GMBH ROBERT9 citations83
US9914636B2Mar 13, 2018
MEMS component including a sound-pressure-sensitive diaphragm element
BOSCH GMBH ROBERT6 citations72
US10393579B2Aug 27, 2019
Miniature spectrometer and a spectroscopic method
BOSCH GMBH ROBERT2 citations68
US11604093B2Mar 14, 2023
Spectrometer device and method for producing a spectrometer device
BOSCH GMBH ROBERT0 citations59
US11959802B2Apr 16, 2024
Spectrometer device and method for producing a spectrometer device
BOSCH GMBH ROBERT0 citations58
US11867890B2Jan 9, 2024
Optical element for light concentration and production method for an optical element for light concentration
BOSCH GMBH ROBERT0 citations53
US10035696B2Jul 31, 2018
MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure
BOSCH GMBH ROBERT0 citations51
US10000374B2Jun 19, 2018
MEMS component
BOSCH GMBH ROBERT1 citations51
US9725300B2Aug 8, 2017
Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
BOSCH GMBH ROBERT1 citations51
US11754445B2Sep 12, 2023
Interferometer element, spectrometer and method for operating an interferometer
BOSCH GMBH ROBERT0 citations50
US11391629B2Jul 19, 2022
Interferometer and method for producing an interferometer
BOSCH GMBH ROBERT0 citations50
US9621996B2Apr 11, 2017
Micromechanical sound transducer system and a corresponding manufacturing method
BOSCH GMBH ROBERT0 citations50
US11946805B2Apr 2, 2024
Spectrometer apparatus and a corresponding method for operating a spectrometer apparatus
BOSCH GMBH ROBERT0 citations49