Inventor

ELSHOT KIM

US2 patents

Patents

2 patents

US6783426B2Aug 31, 2004

Method and apparatus for detection of chemical mechanical planarization endpoint and device planarity

AGERE SYSTEMS INC2 citations51

US6825467B2Nov 30, 2004

Apparatus for scanning a crystalline sample and associated methods

AGERE SYSTEMS INC0 citations40