Inventor

VERPALEN ERIC LOUIS WILLEM

NL2 patents

Patents

2 patents

US7612353B2Nov 3, 2009

Lithographic apparatus, contaminant trap, and device manufacturing method

ASML NETHERLANDS BV8 citations79

US7397056B2Jul 8, 2008

Lithographic apparatus, contaminant trap, and device manufacturing method

ASML NETHERLANDS BV7 citations67