Inventor
LAM ANDREW M
US3 patents
Patents
3 patentsUS7897495B2Mar 1, 2011
Formation of epitaxial layer containing silicon and carbon
APPLIED MATERIALS INC126 citations96
US7588980B2Sep 15, 2009
Methods of controlling morphology during epitaxial layer formation
APPLIED MATERIALS INC10 citations82
US7488690B2Feb 10, 2009
Silicon nitride film with stress control
APPLIED MATERIALS INC11 citations79