Inventor

SLUIJK BOUDEWIJN G

NL2 patents

Patents

2 patents

US5294572AMar 15, 1994

Method and apparatus for depositing a layer on a substrate

ASM INT379 citations95

US5354433AOct 11, 1994

Method for producing a flow of triisobutylaluminum from liquid triisobutylaluminum containing isobutene

ASM INT340 citations94