Inventor
LERCEL MICHAEL J
US8 patents
Patents
8 patentsUS6555297B1Apr 29, 2003
Etch stop barrier for stencil mask fabrication
IBM20 citations90
US6261726B1Jul 17, 2001
Projection electron-beam lithography masks using advanced materials and membrane size
IBM30 citations87
US6461797B1Oct 8, 2002
Method and apparatus for selectively programming a semiconductor device
IBM10 citations73
US6635389B1Oct 21, 2003
Method of defining and forming membrane regions in a substrate for stencil or membrane marks
IBM6 citations71
US6806006B2Oct 19, 2004
Integrated cooling substrate for extreme ultraviolet reticle
IBM12 citations65
US6528215B1Mar 4, 2003
Substrate for diamond stencil mask and method for forming
IBM5 citations60
US7110195B2Sep 19, 2006
Monolithic hard pellicle
IBM1 citations45
US7351348B2Apr 1, 2008
Evaporation control using coating
IBM0 citations41