Inventor
HIAR TODD
US3 patents
Patents
3 patentsUS6873938B1Mar 29, 2005
Adaptive lithographic critical dimension enhancement
ASML NETHERLANDS BV61 citations91
US7274429B2Sep 25, 2007
Integrated lithographic fabrication cluster
ASML NETHERLANDS BV11 citations81
US7019268B2Mar 28, 2006
Wafer processing apparatus and method of use
ASML NETHERLANDS BV2 citations58