Inventor

DAVID ROBERT ALLEN

US2 patents

⚠️ This page may combine multiple inventors who share the name “DAVID ROBERT ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US7521172B2Apr 21, 2009

Topcoat material and use thereof in immersion lithography processes

IBM7 citations70

DAVID ROBERT ALLEN

1 patent

US8945808B2Feb 3, 2015

Self-topcoating resist for photolithography

DAVID ROBERT ALLEN3 citations55