Inventor

BURNS SEAN DAVID

US4 patents

⚠️ This page may combine multiple inventors who share the name “BURNS SEAN DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US7862982B2Jan 4, 2011

Chemical trim of photoresist lines by means of a tuned overcoat material

IBM21 citations92

US7521172B2Apr 21, 2009

Topcoat material and use thereof in immersion lithography processes

IBM7 citations70

BURNS SEAN DAVID

1 patent

US8137893B2Mar 20, 2012

Chemical trim of photoresist lines by means of a tuned overcoat

BURNS SEAN DAVID9 citations79

BRUNNER TIMOTHY ALLAN

1 patent

US8227180B2Jul 24, 2012

Photolithography focus improvement by reduction of autofocus radiation transmission into substrate

BRUNNER TIMOTHY ALLAN1 citations45