P

Inventor

GOLDFARB DARIO LEONARDO

US5 patents
⚠️ This page may combine multiple inventors who share the name “GOLDFARB DARIO LEONARDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents
US8017303B2Sep 13, 2011

Ultra low post exposure bake photoresist materials

IBM7 citations82
US7521172B2Apr 21, 2009

Topcoat material and use thereof in immersion lithography processes

IBM7 citations70
US7807335B2Oct 5, 2010

Immersion lithography contamination gettering layer

IBM1 citations50

LI WAI-KIN

1 patent
US8395228B2Mar 12, 2013

Integration process to improve focus leveling within a lot process variation

LI WAI-KIN0 citations48

GOLDFARB DARIO LEONARDO

1 patent
US8435719B2May 7, 2013

Tunable contact angle process for immersionlithography topcoats and photoresists

GOLDFARB DARIO LEONARDO0 citations40