Inventor

NAGASEKI SUMIE

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NAGASEKI SUMIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAGASEKI SUMIE

2 patents

US8293662B2Oct 23, 2012

Method of manufacturing semiconductor device, apparatus for manufacturing same, and storage medium

NAGASEKI SUMIE3 citations54

US8242026B2Aug 14, 2012

Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium

NAGASEKI SUMIE5 citations54

TOKYO ELECTRON LTD

1 patent

US9343295B2May 17, 2016

Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium

TOKYO ELECTRON LTD1 citations49

MATSUZAKI KAZUYOSHI

1 patent

US8818545B2Aug 26, 2014

Semiconductor fabrication apparatus and temperature adjustment method

MATSUZAKI KAZUYOSHI1 citations41