Inventor
HILL ERIC R
US5 patents
⚠️ This page may combine multiple inventors who share the name “HILL ERIC R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS9514927B2Dec 6, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV467 citations97
US9299557B2Mar 29, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV472 citations97
US10373850B2Aug 6, 2019
Pre-clean chamber and process with substrate tray for changing substrate temperature
ASM IP HOLDING BV3 citations71
US11264255B2Mar 1, 2022
Pre-clean chamber and process with substrate tray for changing substrate temperature
ASM IP HOLDING BV0 citations61