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Inventor
DISANTO JOHN T
US
2 patents
⚠️ This page may combine multiple inventors who share the name “DISANTO JOHN T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGGARWAL RAVINDER
1 patent
US8440048B2
May 14, 2013
Load lock having secondary isolation chamber
AGGARWAL RAVINDER
10 citations
79
ASM INC
1 patent
US8927435B2
Jan 6, 2015
Load lock having secondary isolation chamber
ASM INC
0 citations
47