Inventor

HANSEN STEFAN-HEINRICH

DE3 patents

Patents

3 patents

US11823931B2Nov 21, 2023

Method and device for treating substrates

RENA TECH GMBH0 citations53

US11270901B2Mar 8, 2022

Method and device for treating substrates

RENA TECH GMBH0 citations53

US10529606B2Jan 7, 2020

Device for treating substrates

RENA TECH GMBH0 citations42