Inventor
PEDIADITAKIS STEPHAN ALEXIS
DE4 patents
Patents
4 patentsUS11823931B2Nov 21, 2023
Method and device for treating substrates
RENA TECH GMBH0 citations53
US11270901B2Mar 8, 2022
Method and device for treating substrates
RENA TECH GMBH0 citations53
US10529606B2Jan 7, 2020
Device for treating substrates
RENA TECH GMBH0 citations42
US12217990B2Feb 4, 2025
Method for treating objects and apparatus for carrying out the method
RENA TECH GMBH0 citations37