Inventor
KURUNCZI PETER
US15 patents
⚠️ This page may combine multiple inventors who share the name “KURUNCZI PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
9 patentsUS11402649B2Aug 2, 2022
System and method for optimally forming gratings of diffracted optical elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US11016228B2May 25, 2021
System and method for forming diffracted optical element having varied gratings
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10795173B2Oct 6, 2020
System and method for optimally forming gratings of diffracted optical elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10522330B2Dec 31, 2019
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations71
US10761334B2Sep 1, 2020
System and method for optimally forming gratings of diffracted optical elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations70
US10598832B2Mar 24, 2020
System and method for forming diffracted optical element having varied gratings
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC4 citations70
US11495434B2Nov 8, 2022
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US11037758B2Jun 15, 2021
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US11442207B2Sep 13, 2022
System and method for forming diffracted optical element having varied gratings
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations60