Inventor
KANT NICK
NL5 patents
Patents
5 patentsUS10429749B2Oct 1, 2019
Method of reducing effects of reticle heating and/or cooling in a lithographic process
ASML NETHERLANDS BV18 citations87
US10451977B2Oct 22, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations57
US10564555B2Feb 18, 2020
Method of reducing effects of reticle heating and/or cooling in a lithographic process
ASML NETHERLANDS BV1 citations55
US11573496B2Feb 7, 2023
Method of reducing effects of lens heating and/or cooling in a lithographic process
ASML NETHERLANDS BV0 citations51
US10948832B2Mar 16, 2021
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations50