Inventor
LYONS JOSEPH HARRY
US4 patents
⚠️ This page may combine multiple inventors who share the name “LYONS JOSEPH HARRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
3 patentsUS11656555B2May 23, 2023
Lithographic apparatus and illumination uniformity correction system
ASML HOLDING NV3 citations64
US12158705B2Dec 3, 2024
End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses
ASML HOLDING NV0 citations55
US10429748B2Oct 1, 2019
Apparatus including a gas gauge and method of operating the same
ASML HOLDING NV0 citations42