Inventor
FRISCO PIERLUIGI
NL7 patents
Patents
7 patentsUS11294289B2Apr 5, 2022
Selecting a set of locations associated with a measurement or feature on a substrate
ASML NETHERLANDS BV2 citations68
US12456001B2Oct 28, 2025
Methods for sample scheme generation and optimization
ASML NETHERLANDS BV0 citations57
US11775728B2Oct 3, 2023
Methods for sample scheme generation and optimization
ASML NETHERLANDS BV0 citations57
US11681231B2Jun 20, 2023
Selecting a set of locations associated with a measurement or feature on a substrate
ASML NETHERLANDS BV0 citations57
US11022895B2Jun 1, 2021
Lithographic apparatus adjustment method
ASML NETHERLANDS BV0 citations54
US12147161B2Nov 19, 2024
Methods of tuning a model for a lithographic process and associated apparatuses
ASML NETHERLANDS BV0 citations53
US10678143B2Jun 9, 2020
Projection system modelling method
ASML NETHERLANDS BV0 citations32