Inventor

NOZAKI TOSHIYUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NOZAKI TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

1 patent

US4604180AAug 5, 1986

Target assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering device

ANELVA CORP59 citations90

MES AFTY CORP

1 patent

US7485204B2Feb 3, 2009

ECR plasma source and ECR plasma device

MES AFTY CORP3 citations54