Inventor

HASE SHINOBU

JP3 patents

Patents

3 patents

US4767211AAug 30, 1988

Apparatus for and method of measuring boundary surface

HITACHI LTD80 citations94

US4731855AMar 15, 1988

Pattern defect inspection apparatus

HITACHI LTD74 citations94

US4072767AFeb 7, 1978

Method for controlling chemical vapor deposition

HITACHI LTD6 citations60