Inventor
BURDT Russell Allen
US7 patents
Patents
7 patentsUS9762023B2Sep 12, 2017
Online calibration for repetition rate dependent performance variables
Cymer LLC3 citations71
US11050213B2Jun 29, 2021
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations60
US12169363B2Dec 17, 2024
Radiation source testing
Cymer LLC0 citations59
US10727642B2Jul 28, 2020
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations50
US12360466B2Jul 15, 2025
Maintenance of modules for light sources used in semiconductor photolithography
Cymer LLC0 citations49
US11860036B2Jan 2, 2024
Determination of measurement error in an etalon
Cymer LLC0 citations45
US12007696B2Jun 11, 2024
Burst statistics data aggregation filter
Cymer LLC0 citations43