Inventor
DUFFEY THOMAS PATRICK
US18 patents
⚠️ This page may combine multiple inventors who share the name “DUFFEY THOMAS PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
17 patentsUS11526083B2Dec 13, 2022
Spectral feature selection and pulse timing control of a pulsed light beam
Cymer LLC2 citations71
US11054665B2Jul 6, 2021
Reducing speckle in an excimer light source
Cymer LLC3 citations71
US10451890B2Oct 22, 2019
Reducing speckle in an excimer light source
Cymer LLC3 citations71
US10288484B2May 14, 2019
Homogenization of light beam for spectral feature metrology
Cymer LLC2 citations69
US10345714B2Jul 9, 2019
Lithography optics adjustment and monitoring
Cymer LLC2 citations65
US11768438B2Sep 26, 2023
Spectral feature selection and pulse timing control of a pulsed light beam
Cymer LLC0 citations61
US11686951B2Jun 27, 2023
Reducing speckle in an excimer light source
Cymer LLC0 citations61
US10228322B2Mar 12, 2019
Apparatus for and method of sensing fluorine concentration
Cymer LLC1 citations61
US12374853B2Jul 29, 2025
Control system for a plurality of deep ultraviolet optical oscillators
Cymer LLC0 citations59
US12169363B2Dec 17, 2024
Radiation source testing
Cymer LLC0 citations59
US12586978B2Mar 24, 2026
Apparatus for and method of generating multiple laser beams
Cymer LLC0 citations57
US11777271B2Oct 3, 2023
Method of and apparatus for extending electrode life in a laser chamber
Cymer LLC1 citations54
US10852227B2Dec 1, 2020
Apparatus for and method of sensing fluorine concentration
Cymer LLC0 citations51
US10267687B2Apr 23, 2019
Adjusting an amount of coherence of a light beam
Cymer LLC0 citations49
US9945730B2Apr 17, 2018
Adjusting an amount of coherence of a light beam
Cymer LLC1 citations49
US10012544B2Jul 3, 2018
Homogenization of light beam for spectral feature metrology
Cymer LLC0 citations48
US10845711B2Nov 24, 2020
Lithography optics adjustment and monitoring
Cymer LLC0 citations45