Inventor
RANGANATHAN REKHA
US4 patents
Patents
4 patentsUS6042654AMar 28, 2000
Method of cleaning CVD cold-wall chamber and exhaust lines
APPLIED MATERIALS INC134 citations95
US6153260ANov 28, 2000
Method for heating exhaust gas in a substrate reactor
APPLIED MATERIALS INC45 citations94
US6368567B2Apr 9, 2002
Point-of-use exhaust by-product reactor
APPLIED MATERIALS INC19 citations91
US6254686B1Jul 3, 2001
Vented lower liner for heating exhaust gas from a single substrate reactor
APPLIED MATERIALS INC28 citations90