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Inventor
WEIGAND HOLGER
DE
3 patents
⚠️ This page may combine multiple inventors who share the name “WEIGAND HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
1 patent
US6642525B2
Nov 4, 2003
Particle-optical component and system comprising a particle-optical component
ZEISS CARL SMT AG
18 citations
79
LAYH MICHAEL
1 patent
US9304400B2
Apr 5, 2016
Illumination system for EUV microlithography
LAYH MICHAEL
0 citations
39
ZEISS CARL SPORTS OPTICS GMBH
1 patent
US9002189B2
Apr 7, 2015
Long-range optical device having image stabilization and improved pivot detection
ZEISS CARL SPORTS OPTICS GMBH
0 citations
36