Inventor

HAYES TIMOTHY S

US6 patents

⚠️ This page may combine multiple inventors who share the name “HAYES TIMOTHY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

5 patents

US6724947B1Apr 20, 2004

Method and system for measuring characteristics of curved features

IBM20 citations89

US6980937B2Dec 27, 2005

Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data

IBM15 citations81

US6864189B2Mar 8, 2005

Methodology for measuring and controlling film thickness profiles

IBM7 citations71

US8927411B2Jan 6, 2015

System and method for forming an aluminum fuse for compatibility with copper BEOL interconnect scheme

IBM1 citations51

US6774019B2Aug 10, 2004

Incorporation of an impurity into a thin film

IBM1 citations39

ANDERSON FELIX P

1 patent

US8921975B2Dec 30, 2014

System and method for forming aluminum fuse for compatibility with copper BEOL interconnect scheme

ANDERSON FELIX P8 citations82