Inventor
LEYBOVICH ALEXANDER
US7 patents
Patents
7 patentsUS6494098B1Dec 17, 2002
Method of ultrasonic on-line texture characterization
TOSOH SMD INC39 citations90
US6487910B1Dec 3, 2002
Method and apparatus for quantitative sputter target cleanliness and characterization
TOSOH SMD INC25 citations90
US6739196B2May 25, 2004
Cleanliness evaluation in sputter targets using phase
TOSOH SMD INC15 citations81
US7087142B2Aug 8, 2006
Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target
TOSOH SMD INC3 citations61
US7334479B2Feb 26, 2008
Systems and methods for non-contact measuring sputtering target thickness ultrasonics
TOSOH SMD INC3 citations60
US7712514B2May 11, 2010
Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
TOSOH SMD INC0 citations51
US6895342B2May 17, 2005
Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location
TOSOH SMD INC1 citations49