Inventor

CLARK ROBERT DANIEL

US2 patents

Patents

2 patents

US7261118B2Aug 28, 2007

Method and vessel for the delivery of precursor materials

AIR PROD & CHEM29 citations89

US7582574B2Sep 1, 2009

Diethylsilane as a silicon source in the deposition of metal silicate films

AIR PROD & CHEM0 citations49