Inventor
EGAN TODD J
US25 patents
⚠️ This page may combine multiple inventors who share the name “EGAN TODD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS9405287B1Aug 2, 2016
Apparatus and method for optical calibration of wafer placement by a robot
APPLIED MATERIALS INC11 citations83
US10816464B2Oct 27, 2020
Imaging reflectometer
APPLIED MATERIALS INC2 citations73
US12265377B2Apr 1, 2025
Autonomous substrate processing system
APPLIED MATERIALS INC3 citations71
US11856833B2Dec 26, 2023
In-line monitoring of OLED layer thickness and dopant concentration
APPLIED MATERIALS INC3 citations71
US10260855B2Apr 16, 2019
Electroplating tool with feedback of metal thickness distribution and correction
APPLIED MATERIALS INC2 citations70
US11709477B2Jul 25, 2023
Autonomous substrate processing system
APPLIED MATERIALS INC3 citations69
US11187654B2Nov 30, 2021
Imaging reflectometer
APPLIED MATERIALS INC1 citations62
US10736182B2Aug 4, 2020
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers
APPLIED MATERIALS INC1 citations62
US9631919B2Apr 25, 2017
Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating
APPLIED MATERIALS INC1 citations62
US9335151B2May 10, 2016
Film measurement
APPLIED MATERIALS INC2 citations62
US12225808B2Feb 11, 2025
In-line monitoring of OLED layer thickness and dopant concentration
APPLIED MATERIALS INC0 citations60
US7969568B2Jun 28, 2011
Spectrographic metrology of patterned wafers
APPLIED MATERIALS INC2 citations60
US12098914B2Sep 24, 2024
Surface roughness and emissivity determination
APPLIED MATERIALS INC1 citations59
US12276490B2Apr 15, 2025
System and method to map thickness variations of substrates in manufacturing systems
APPLIED MATERIALS INC0 citations52
US9218992B2Dec 22, 2015
Hybrid laser and plasma etch wafer dicing using substrate carrier
APPLIED MATERIALS INC1 citations52
US11226234B2Jan 18, 2022
Spectrum shaping devices and techniques for optical characterization applications
APPLIED MATERIALS INC0 citations51
US10234261B2Mar 19, 2019
Fast and continuous eddy-current metrology of a conductive film
APPLIED MATERIALS INC0 citations51
US11609183B2Mar 21, 2023
Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines
APPLIED MATERIALS INC0 citations50
US9429247B2Aug 30, 2016
Acoustically-monitored semiconductor substrate processing systems and methods
APPLIED MATERIALS INC0 citations50
US12002665B2Jun 4, 2024
Real-time detection of particulate matter during deposition chamber manufacturing
APPLIED MATERIALS INC0 citations47