Inventor
HUANG Bang-Yu
TW5 patents
Patents
5 patentsUS9780209B1Oct 3, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations70
US10818563B2Oct 27, 2020
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US10515861B2Dec 24, 2019
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US11610825B2Mar 21, 2023
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9978634B2May 22, 2018
Method for fabricating shallow trench isolation and semiconductor structure using the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50