Inventor
MALLINGER JURGEN
AT8 patents
Patents
8 patentsUS10943807B2Mar 9, 2021
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH7 citations82
US10692747B2Jun 23, 2020
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH6 citations82
US11315901B2Apr 26, 2022
Method for bonding substrates
EV GROUP E THALLNER GMBH3 citations71
US10991609B2Apr 27, 2021
Method and substrate holder for the controlled bonding of substrates
EV GROUP E THALLNER GMBH2 citations71
US11315813B2Apr 26, 2022
Substrate holder and method for bonding two substrates
EV GROUP E THALLNER GMBH2 citations68
US12412865B2Sep 9, 2025
Apparatus and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations61
US12550679B2Feb 10, 2026
Substrate holder device and method for bonding
EV GROUP E THALLNER GMBH0 citations60
US11488851B2Nov 1, 2022
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH0 citations60