Inventor
Gellineau Antonio Arion
US16 patents
⚠️ This page may combine multiple inventors who share the name “Gellineau Antonio Arion”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
9 patentsUS11698251B2Jul 11, 2023
Methods and systems for overlay measurement based on soft X-ray Scatterometry
KLA CORP2 citations73
US11313816B2Apr 26, 2022
Full beam metrology for x-ray scatterometry systems
KLA CORP2 citations72
US11145559B2Oct 12, 2021
Process monitoring of deep structures with X-ray scatterometry
KLA CORP4 citations72
US11519719B2Dec 6, 2022
Transmission small-angle X-ray scattering metrology system
KLA CORP3 citations71
US12360062B1Jul 15, 2025
Methods and systems for regularizing the optimization of application specific semiconductor measurement system parameter settings
KLA CORP2 citations62
US11955391B2Apr 9, 2024
Process monitoring of deep structures with X-ray scatterometry
KLA CORP0 citations62
US12320763B2Jun 3, 2025
Full beam metrology for x-ray scatterometry systems
KLA CORP0 citations61
US11990380B2May 21, 2024
Methods and systems for combining x-ray metrology data sets to improve parameter estimation
KLA CORP0 citations48
US12019030B2Jun 25, 2024
Methods and systems for targeted monitoring of semiconductor measurement quality
KLA CORP0 citations41
KLA TENCOR CORP
7 patentsUS10352695B2Jul 16, 2019
X-ray scatterometry metrology for high aspect ratio structures
KLA TENCOR CORP68 citations97
US10775323B2Sep 15, 2020
Full beam metrology for X-ray scatterometry systems
KLA TENCOR CORP19 citations93
US10727142B2Jul 28, 2020
Process monitoring of deep structures with X-ray scatterometry
KLA TENCOR CORP17 citations93
US10983227B2Apr 20, 2021
On-device metrology using target decomposition
KLA TENCOR CORP3 citations72
US10767978B2Sep 8, 2020
Transmission small-angle X-ray scattering metrology system
KLA TENCOR CORP4 citations71
US10504759B2Dec 10, 2019
Semiconductor metrology with information from multiple processing steps
KLA TENCOR CORP1 citations62
US11519869B2Dec 6, 2022
Methods and systems for real time measurement control
KLA TENCOR CORP0 citations51