Inventor

KUMAGAI SHUJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KUMAGAI SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSOH CORP

1 patent

US6605735B2Aug 12, 2003

Ruthenium complex, process for producing the same and process for producing thin film

TOSOH CORP126 citations95

ANELVA CORP

1 patent

US6461484B2Oct 8, 2002

Sputtering device

ANELVA CORP18 citations78

CANON ANELVA CORP

1 patent

US12308254B2May 20, 2025

Load lock device

CANON ANELVA CORP0 citations59