Inventor
GUO YUE
US74 patents
⚠️ This page may combine multiple inventors who share the name “GUO YUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
37 patentsUS10312056B2Jun 4, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC39 citations98
US11462389B2Oct 4, 2022
Pulsed-voltage hardware assembly for use in a plasma processing system
APPLIED MATERIALS INC12 citations93
US10707086B2Jul 7, 2020
Etching methods
APPLIED MATERIALS INC40 citations93
US11848176B2Dec 19, 2023
Plasma processing using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC5 citations86
US11476090B1Oct 18, 2022
Voltage pulse time-domain multiplexing
APPLIED MATERIALS INC14 citations86
US11776789B2Oct 3, 2023
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US11651966B2May 16, 2023
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC6 citations85
US11462388B2Oct 4, 2022
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US10544505B2Jan 28, 2020
Deposition or treatment of diamond-like carbon in a plasma reactor
APPLIED MATERIALS INC12 citations85
US10418225B2Sep 17, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC4 citations84
US12237148B2Feb 25, 2025
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC2 citations74
US11967483B2Apr 23, 2024
Plasma excitation with ion energy control
APPLIED MATERIALS INC2 citations73
US11721525B2Aug 8, 2023
Sensorless RF impedance matching network
APPLIED MATERIALS INC2 citations73
US11043387B2Jun 22, 2021
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations73
US10510515B2Dec 17, 2019
Processing tool with electrically switched electrode assembly
APPLIED MATERIALS INC5 citations73
US10373807B2Aug 6, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC1 citations73
US11043375B2Jun 22, 2021
Plasma deposition of carbon hardmask
APPLIED MATERIALS INC4 citations72
US12580155B2Mar 17, 2026
Learning based tuning in a radio frequency plasma processing chamber
APPLIED MATERIALS INC1 citations64
US12505982B2Dec 23, 2025
Method and apparatus for digital control of ion energy distribution in a plasma
APPLIED MATERIALS INC0 citations63
US12469680B2Nov 11, 2025
Radio-frequency (RF) matching network for fast impedance tuning
APPLIED MATERIALS INC1 citations63
US12368020B2Jul 22, 2025
Pulsed voltage source for plasma processing applications
APPLIED MATERIALS INC1 citations63
US12347647B2Jul 1, 2025
Plasma excitation with ion energy control
APPLIED MATERIALS INC0 citations63
US12293897B2May 6, 2025
Radio frequency diverter assembly enabling on-demand different spatial
APPLIED MATERIALS INC1 citations63
US12261019B2Mar 25, 2025
Voltage pulse time-domain multiplexing
APPLIED MATERIALS INC0 citations63
US12106938B2Oct 1, 2024
Distortion current mitigation in a radio frequency plasma processing chamber
APPLIED MATERIALS INC0 citations63
US11823868B2Nov 21, 2023
Hardware switch on main feed line in a radio frequency plasma processing chamber
APPLIED MATERIALS INC0 citations63
US11810760B2Nov 7, 2023
Apparatus and method of ion current compensation
APPLIED MATERIALS INC0 citations63
US11776788B2Oct 3, 2023
Pulsed voltage boost for substrate processing
APPLIED MATERIALS INC0 citations63
US12111341B2Oct 8, 2024
In-situ electric field detection method and apparatus
APPLIED MATERIALS INC1 citations61
US11972924B2Apr 30, 2024
Pulsed voltage source for plasma processing applications
APPLIED MATERIALS INC0 citations61
US10546731B1Jan 28, 2020
Method, apparatus and system for wafer dechucking using dynamic voltage sweeping
APPLIED MATERIALS INC1 citations61
US12080519B2Sep 3, 2024
Smart dynamic load simulator for RF power delivery control system
APPLIED MATERIALS INC0 citations60
US12020901B2Jun 25, 2024
RF impedance matching networks for substrate processing platform
APPLIED MATERIALS INC1 citations60
US12125689B2Oct 22, 2024
Methods and apparatus for toroidal plasma generation
APPLIED MATERIALS INC0 citations59
US12567539B2Mar 3, 2026
Methods for forming a high current inductor and non-transitory computer readable medium
APPLIED MATERIALS INC0 citations58
US12046449B2Jul 23, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations58
US12400845B2Aug 26, 2025
Ion energy control on electrodes in a plasma reactor
APPLIED MATERIALS INC0 citations52
GLOBAL ELMEAST INC
2 patentsPLUSAI INC
1 patentHUANG RU
1 patentUNIV HONG KONG
1 patentDCA COMMERCIAL LTD
1 patentTHUNDER TOKEN INC
1 patentJPMORGAN CHASE BANK NA
1 patentWALMART APOLLO LLC
1 patentUNIV WUYI
1 patentBEIJING BOE DISPLAY TECH CO
1 patentAN XIA
1 patentVIVO MOBILE COMMUNICATION CO LTD
1 patentShowing the top 50 of 74 patents by PatentIndex Score.