P

Inventor

GUO YUE

US74 patents
⚠️ This page may combine multiple inventors who share the name “GUO YUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

37 patents
US10312056B2Jun 4, 2019

Distributed electrode array for plasma processing

APPLIED MATERIALS INC39 citations98
US11462389B2Oct 4, 2022

Pulsed-voltage hardware assembly for use in a plasma processing system

APPLIED MATERIALS INC12 citations93
US10707086B2Jul 7, 2020

Etching methods

APPLIED MATERIALS INC40 citations93
US11848176B2Dec 19, 2023

Plasma processing using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC5 citations86
US11476090B1Oct 18, 2022

Voltage pulse time-domain multiplexing

APPLIED MATERIALS INC14 citations86
US11776789B2Oct 3, 2023

Plasma processing assembly using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC6 citations85
US11651966B2May 16, 2023

Methods and apparatus for processing a substrate

APPLIED MATERIALS INC6 citations85
US11462388B2Oct 4, 2022

Plasma processing assembly using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC6 citations85
US10544505B2Jan 28, 2020

Deposition or treatment of diamond-like carbon in a plasma reactor

APPLIED MATERIALS INC12 citations85
US10418225B2Sep 17, 2019

Distributed electrode array for plasma processing

APPLIED MATERIALS INC4 citations84
US12237148B2Feb 25, 2025

Plasma processing assembly using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC2 citations74
US11967483B2Apr 23, 2024

Plasma excitation with ion energy control

APPLIED MATERIALS INC2 citations73
US11721525B2Aug 8, 2023

Sensorless RF impedance matching network

APPLIED MATERIALS INC2 citations73
US11043387B2Jun 22, 2021

Methods and apparatus for processing a substrate

APPLIED MATERIALS INC2 citations73
US10510515B2Dec 17, 2019

Processing tool with electrically switched electrode assembly

APPLIED MATERIALS INC5 citations73
US10373807B2Aug 6, 2019

Distributed electrode array for plasma processing

APPLIED MATERIALS INC1 citations73
US11043375B2Jun 22, 2021

Plasma deposition of carbon hardmask

APPLIED MATERIALS INC4 citations72
US12580155B2Mar 17, 2026

Learning based tuning in a radio frequency plasma processing chamber

APPLIED MATERIALS INC1 citations64
US12505982B2Dec 23, 2025

Method and apparatus for digital control of ion energy distribution in a plasma

APPLIED MATERIALS INC0 citations63
US12469680B2Nov 11, 2025

Radio-frequency (RF) matching network for fast impedance tuning

APPLIED MATERIALS INC1 citations63
US12368020B2Jul 22, 2025

Pulsed voltage source for plasma processing applications

APPLIED MATERIALS INC1 citations63
US12347647B2Jul 1, 2025

Plasma excitation with ion energy control

APPLIED MATERIALS INC0 citations63
US12293897B2May 6, 2025

Radio frequency diverter assembly enabling on-demand different spatial

APPLIED MATERIALS INC1 citations63
US12261019B2Mar 25, 2025

Voltage pulse time-domain multiplexing

APPLIED MATERIALS INC0 citations63
US12106938B2Oct 1, 2024

Distortion current mitigation in a radio frequency plasma processing chamber

APPLIED MATERIALS INC0 citations63
US11823868B2Nov 21, 2023

Hardware switch on main feed line in a radio frequency plasma processing chamber

APPLIED MATERIALS INC0 citations63
US11810760B2Nov 7, 2023

Apparatus and method of ion current compensation

APPLIED MATERIALS INC0 citations63
US11776788B2Oct 3, 2023

Pulsed voltage boost for substrate processing

APPLIED MATERIALS INC0 citations63
US12111341B2Oct 8, 2024

In-situ electric field detection method and apparatus

APPLIED MATERIALS INC1 citations61
US11972924B2Apr 30, 2024

Pulsed voltage source for plasma processing applications

APPLIED MATERIALS INC0 citations61
US10546731B1Jan 28, 2020

Method, apparatus and system for wafer dechucking using dynamic voltage sweeping

APPLIED MATERIALS INC1 citations61
US12080519B2Sep 3, 2024

Smart dynamic load simulator for RF power delivery control system

APPLIED MATERIALS INC0 citations60
US12020901B2Jun 25, 2024

RF impedance matching networks for substrate processing platform

APPLIED MATERIALS INC1 citations60
US12125689B2Oct 22, 2024

Methods and apparatus for toroidal plasma generation

APPLIED MATERIALS INC0 citations59
US12567539B2Mar 3, 2026

Methods for forming a high current inductor and non-transitory computer readable medium

APPLIED MATERIALS INC0 citations58
US12046449B2Jul 23, 2024

Methods and apparatus for processing a substrate

APPLIED MATERIALS INC0 citations58
US12400845B2Aug 26, 2025

Ion energy control on electrodes in a plasma reactor

APPLIED MATERIALS INC0 citations52

GLOBAL ELMEAST INC

2 patents

PLUSAI INC

1 patent

HUANG RU

1 patent

UNIV HONG KONG

1 patent

DCA COMMERCIAL LTD

1 patent

THUNDER TOKEN INC

1 patent

JPMORGAN CHASE BANK NA

1 patent

WALMART APOLLO LLC

1 patent

UNIV WUYI

1 patent

BEIJING BOE DISPLAY TECH CO

1 patent

AN XIA

1 patent

VIVO MOBILE COMMUNICATION CO LTD

1 patent

Showing the top 50 of 74 patents by PatentIndex Score.