Inventor
KOROVIN NIKOLAY
US8 patents
⚠️ This page may combine multiple inventors who share the name “KOROVIN NIKOLAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
6 patentsUS6572755B2Jun 3, 2003
Method and apparatus for electrochemically depositing a material onto a workpiece surface
SPEEDFAM IPEC CORP33 citations92
US6544103B1Apr 8, 2003
Method to determine optimum geometry of a multizone carrier
SPEEDFAM IPEC CORP30 citations91
US6468131B1Oct 22, 2002
Method to mathematically characterize a multizone carrier
SPEEDFAM IPEC CORP20 citations91
US6790123B2Sep 14, 2004
Method for processing a work piece in a multi-zonal processing apparatus
SPEEDFAM IPEC CORP7 citations73
US6503767B2Jan 7, 2003
Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization process
SPEEDFAM IPEC CORP8 citations72
US6508694B2Jan 21, 2003
Multi-zone pressure control carrier
SPEEDFAM IPEC CORP5 citations61