Inventor
YAMAUCHI TAKAHIRO
JP24 patents
⚠️ This page may combine multiple inventors who share the name “YAMAUCHI TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
5 patentsUS6661105B2Dec 9, 2003
Alignment mark structure
OKI ELECTRIC IND CO LTD14 citations92
US5024919AJun 18, 1991
Process for forming fine pattern in semiconductor device
OKI ELECTRIC IND CO LTD29 citations92
US6953733B2Oct 11, 2005
Method of manufacturing alignment mark and aligning method using the same
OKI ELECTRIC IND CO LTD2 citations62
US6894782B2May 17, 2005
Method of measuring defocusing and method of obtaining correct focusing
OKI ELECTRIC IND CO LTD3 citations60
US7045909B2May 16, 2006
Alignment mark structure
OKI ELECTRIC IND CO LTD0 citations52
MITSUBISHI HITACHI POWER SYS LTD
3 patentsUS11442443B2Sep 13, 2022
Monitoring device, method for monitoring target device, and program
MITSUBISHI HITACHI POWER SYS LTD1 citations61
US11209811B2Dec 28, 2021
Diagnostic device, diagnostic method, and program
MITSUBISHI HITACHI POWER SYS LTD1 citations59
US11591925B2Feb 28, 2023
Monitoring device, method for monitoring target device, and program
MITSUBISHI HITACHI POWER SYS LTD0 citations51