Inventor
SIMMS IHSAN
BE7 patents
Patents
7 patentsUS10490402B2Nov 26, 2019
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD2 citations68
US12226796B2Feb 18, 2025
Bath systems and methods thereof
TOKYO ELECTRON LTD0 citations60
US11738363B2Aug 29, 2023
Bath systems and methods thereof
TOKYO ELECTRON LTD1 citations60
US11538684B2Dec 27, 2022
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD0 citations58
US10886290B2Jan 5, 2021
Etching of silicon nitride and silica deposition control in 3D NAND structures
TOKYO ELECTRON LTD1 citations54
US12488452B2Dec 2, 2025
Wafer bath imaging
TOKYO ELECTRON LTD0 citations49
US11376640B2Jul 5, 2022
Apparatus and method to electrostatically remove foreign matter from substrate surfaces
TOKYO ELECTRON LTD0 citations47