Inventor
NEGREIRA AINHOA
BE2 patents
Patents
2 patentsUS10490402B2Nov 26, 2019
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD2 citations68
US11538684B2Dec 27, 2022
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD0 citations58