Inventor
KOCH MARKUS
DE28 patents
⚠️ This page may combine multiple inventors who share the name “KOCH MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
10 patentsUS11079338B2Aug 3, 2021
Method for detecting a structure of a lithography mask and device for carrying out the method
ZEISS CARL SMT GMBH2 citations71
US11061331B2Jul 13, 2021
Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth
ZEISS CARL SMT GMBH0 citations48
US10564551B2Feb 18, 2020
Method for determining a focus position of a lithography mask and metrology system for carrying out such a method
ZEISS CARL SMT GMBH0 citations48
US12422743B2Sep 23, 2025
Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method
ZEISS CARL SMT GMBH0 citations47
US11188000B2Nov 30, 2021
Method and device for characterizing a mask for microlithography
ZEISS CARL SMT GMBH0 citations47
US12492963B2Dec 9, 2025
Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured
ZEISS CARL SMT GMBH0 citations46
US12372431B2Jul 29, 2025
Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured
ZEISS CARL SMT GMBH0 citations46
US12158703B2Dec 3, 2024
Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method
ZEISS CARL SMT GMBH0 citations45
US10775691B2Sep 15, 2020
Method for examining photolithographic masks and mask metrology apparatus for performing the method
ZEISS CARL SMT GMBH0 citations39
US10481505B2Nov 19, 2019
Method for determining an imaging aberration contribution of an imaging optical unit for measuring lithography masks
ZEISS CARL SMT GMBH0 citations37
Bayer Pharma AG
3 patentsUS10844016B2Nov 24, 2020
Aromatic sulfonamide derivatives
Bayer Pharma AG7 citations79
US11524938B2Dec 13, 2022
Aromatic sulfonamide derivatives
Bayer Pharma AG0 citations57
US11266646B2Mar 8, 2022
Use of chymase inhibitors for the treatment of endometriosis, post operative fibrosis and diseases which are characterized by fibrosis formation
Bayer Pharma AG0 citations44