P

Inventor

KOCH MARKUS

DE28 patents
⚠️ This page may combine multiple inventors who share the name “KOCH MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

10 patents
US11079338B2Aug 3, 2021

Method for detecting a structure of a lithography mask and device for carrying out the method

ZEISS CARL SMT GMBH2 citations71
US11061331B2Jul 13, 2021

Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth

ZEISS CARL SMT GMBH0 citations48
US10564551B2Feb 18, 2020

Method for determining a focus position of a lithography mask and metrology system for carrying out such a method

ZEISS CARL SMT GMBH0 citations48
US12422743B2Sep 23, 2025

Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method

ZEISS CARL SMT GMBH0 citations47
US11188000B2Nov 30, 2021

Method and device for characterizing a mask for microlithography

ZEISS CARL SMT GMBH0 citations47
US12492963B2Dec 9, 2025

Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured

ZEISS CARL SMT GMBH0 citations46
US12372431B2Jul 29, 2025

Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured

ZEISS CARL SMT GMBH0 citations46
US12158703B2Dec 3, 2024

Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method

ZEISS CARL SMT GMBH0 citations45
US10775691B2Sep 15, 2020

Method for examining photolithographic masks and mask metrology apparatus for performing the method

ZEISS CARL SMT GMBH0 citations39
US10481505B2Nov 19, 2019

Method for determining an imaging aberration contribution of an imaging optical unit for measuring lithography masks

ZEISS CARL SMT GMBH0 citations37

Bayer Pharma AG

3 patents

DAIMLERCHRYSLER RAIL SYSTEMS

2 patents

SECTAGO GMBH

2 patents

BOSCH GMBH ROBERT

2 patents

RITTER ANDREAS

2 patents

PORSCHE AG

2 patents

BOSTIK INC

1 patent

DAIMLER CHRYSLER AG

1 patent

BAUER PETER

1 patent

NANOGATE AG

1 patent

CLAAS SELBSTFAHRENDE ERNTEMASCHINEN GMBH

1 patent