Inventor
FRANSSEN JOHANNES HENDRIKUS GERTRUDIS
NL4 patents
Patents
4 patentsUS7878755B2Feb 1, 2011
Load lock and method for transferring objects
ASML NETHERLANDS BV8 citations79
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58
US7791708B2Sep 7, 2010
Lithographic apparatus, substrate table, and method for enhancing substrate release properties
ASML NETHERLANDS BV5 citations55
US7508494B2Mar 24, 2009
Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate
ASML NETHERLANDS BV0 citations40