Inventor
JEON MIN SUNG
JP6 patents
⚠️ This page may combine multiple inventors who share the name “JEON MIN SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10290466B2May 14, 2019
Boron implanting using a co-gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations72
US9865430B2Jan 9, 2018
Boron implanting using a co-gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US9441290B2Sep 13, 2016
System and method of improving implant quality in a plasma-based implant system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51