Inventor · disambiguated record
Claus Dusemund
Also filed as: DUSEMUND CLAUS
5 granted patents·48 citations·filing 1998–2011
80Inventor score
Top patents by PatentIndex Score
5 records- 0180US8716039B2Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatusDUSEMUND CLAUS·Filed 2011·Granted May 6, 2014·9 cites·20 claims
- 0264US6939527B2Method for the purification of hydrogen peroxide solutionsMERCK PATENT GMBH·Filed 2001·Granted Sep 6, 2005·10 cites·20 claims
- 0351US6679764B2Supply system for chemicals and its useMERCK PATENT GMBH·Filed 2001·Granted Jan 20, 2004·6 cites·15 claims
- 0444US6338743B1Buffer solutions for suspensions used in chemical-mechanical polishingMERCK PATENT GMBH·Filed 1998·Granted Jan 15, 2002·15 cites·10 claims
- 0529US6623248B1System for conveying liquids without pulsingMERCK PATENT GMBH·Filed 1999·Granted Sep 23, 2003·8 cites·19 claims
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