Inventor

VUGTS JOSEPHUS CORNELIUS JOHANNES ANTONIUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VUGTS JOSEPHUS CORNELIUS JOHANNES ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7878755B2Feb 1, 2011

Load lock and method for transferring objects

ASML NETHERLANDS BV8 citations79

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS

1 patent

US9289802B2Mar 22, 2016

Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48

VAN DEN HEUVEL MARTINUS WILHELMUS

1 patent

US8976332B2Mar 10, 2015

Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system

VAN DEN HEUVEL MARTINUS WILHELMUS0 citations40