Inventor
KAMP TOM
US8 patents
⚠️ This page may combine multiple inventors who share the name “KAMP TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS9396961B2Jul 19, 2016
Integrated etch/clean for dielectric etch applications
LAM RES CORP105 citations96
US9620376B2Apr 11, 2017
Self limiting lateral atomic layer etch
LAM RES CORP90 citations93
US8852964B2Oct 7, 2014
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP14 citations82
US9012243B2Apr 21, 2015
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP4 citations71
US10714354B2Jul 14, 2020
Self limiting lateral atomic layer etch
LAM RES CORP2 citations68
US10431426B2Oct 1, 2019
Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems
LAM RES CORP0 citations51
US9484214B2Nov 1, 2016
Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma
LAM RES CORP0 citations51