Inventor
UMEGAKI SHIRO
JP5 patents
Patents
5 patentsUS10473598B2Nov 12, 2019
X-ray thin film inspection device
RIGAKU DENKI CO LTD33 citations92
US6266392B1Jul 24, 2001
Soller slit and manufacturing method of the same
RIGAKU DENKI CO LTD28 citations90
US10876978B2Dec 29, 2020
X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve
RIGAKU DENKI CO LTD8 citations82
US11079345B2Aug 3, 2021
X-ray inspection device
RIGAKU DENKI CO LTD4 citations71
US7197117B2Mar 27, 2007
Rotating anode X-ray tube and X-ray generator
RIGAKU DENKI CO LTD5 citations57