Inventor
ASANO SHIGEMATSU
JP6 patents
Patents
6 patentsUS10473598B2Nov 12, 2019
X-ray thin film inspection device
RIGAKU DENKI CO LTD33 citations92
US10876978B2Dec 29, 2020
X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve
RIGAKU DENKI CO LTD8 citations82
US11079345B2Aug 3, 2021
X-ray inspection device
RIGAKU DENKI CO LTD4 citations71
US12222303B2Feb 11, 2025
Transmissive small-angle scattering device
RIGAKU DENKI CO LTD0 citations60
US12019036B2Jun 25, 2024
Transmissive small-angle scattering device
RIGAKU DENKI CO LTD0 citations60
US11754515B2Sep 12, 2023
Transmissive small-angle scattering device
RIGAKU DENKI CO LTD0 citations60