Inventor

HIGUCHI Akifusa

JP3 patents

Patents

3 patents

US10473598B2Nov 12, 2019

X-ray thin film inspection device

RIGAKU DENKI CO LTD33 citations92

US10876978B2Dec 29, 2020

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

RIGAKU DENKI CO LTD8 citations82

US11079345B2Aug 3, 2021

X-ray inspection device

RIGAKU DENKI CO LTD4 citations71