P

Inventor

JOHNSGARD MARK W

US8 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSGARD MARK W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIRGARD INC

5 patents
US4986838AJan 22, 1991

Inlet system for gas scrubber

AIRGARD INC69 citations93
US10864526B2Dec 15, 2020

Electrode for electrostatic precipitator gas scrubbing apparatus

AIRGARD INC2 citations71
US11976890B2May 7, 2024

Concentrically heated inlet tube for gas scrubbing apparatus

AIRGARD INC0 citations56
US9138679B2Sep 22, 2015

Systems and methods to prevent back-flash in an abatement system

AIRGARD INC1 citations49
US9023303B2May 5, 2015

Extended or multiple reaction zones in scrubbing apparatus

AIRGARD INC0 citations49

MATTSON TECH INC

2 patents
US6301434B1Oct 9, 2001

Apparatus and method for CVD and thermal processing of semiconductor substrates

MATTSON TECH INC133 citations96
US6902622B2Jun 7, 2005

Systems and methods for epitaxially depositing films on a semiconductor substrate

MATTSON TECH INC38 citations89

EXENTEC U S INC

1 patent
US12544770B2Feb 10, 2026

Method and apparatus for cleaning an electrostatic precipitator gas scrubbing apparatus

EXENTEC U S INC0 citations38